Formation of TiN-based thin films on AISI M2 steel using the PVD technique
Keywords:
Cathodic pulverization, Thin layers, Attrition
Abstract
The deposition of TiN thin films with a few nanometers thickness was carried out through reactive sputtering of a Ti target in an Ar+N atmosphere using a DC power supply. The deposited films were made on AISI M2 steel specimens cut from a 1 to 1.5” diameter bar with a maximum thickness of 8 mm. Finally, the TiN layers were characterized using various techniques including: Optical Microscopy (OM), Scanning Electron Microscopy (SEM) linked with Energy Dispersive Spectroscopy (EDS), Pin on disc and Scratch.
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References
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2. HOLMBERG, K., RONKAINEN, H., MATTHEWS, A. Tribology of thin coatings. Ceramics International, 2000, vol. 26, p. 787–795.
3. HUA, M. Tribological behaviors of patterned PVD TiN spot coatings on M2 steel coated with different bias voltage. Surface and Coatings Technology, 2006, vol. 200, p. 3612–3625.
4. WANG, C. F. Microestructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering. Trans. of Nonferrous Met. Soc. of China, 2014, vol. 24, p. 126– 133. ISSN: 1003-6326.
5. Metals-Handbooks, manuals, etc. I. ASM International. Handbook Committee, 10th ed. USA: ASM International, 1990, vol. 4, p. 126 –133. ISBN: 0-87170-379-3.
6. ALVAREZ, J., MELO, D., OSEGUERA, J., LÓPEZ, V. Protective coatings against metal dusting. Surface and Coatings Technology, 2008, vol. 203, p. 422–426. ISSN: 0257-8972.
7. LÓPEZ, L. M., SALAS, O., MELO-MÁXIMO, L., OSEGUERA, J., LEPIENSKI, C. M., SOARES, P., TORRES, R. D., SOUZA, R. M. Structural and mechanical analysis for the optimization of PVD oxide coatings for protection against metal dusting. Applied Surface Science, 2012, vol. 258, p. 7306–7313.
Published
2015-09-01
How to Cite
Gómez-Vargas, O., Oseguera-Peña, J., Ortiz-Domínguez, M., García-Macedo, J., Solís-Romero, J., Castellanos-Escamilla, V., Figueroa-López, U., Arenas-Flores, A., Barrientos-Hernández, F., & Cardoso-Legorreta, E. (2015). Formation of TiN-based thin films on AISI M2 steel using the PVD technique. Tópicos De Investigación En Ciencias De La Tierra Y Materiales, 2(2), 118-126. https://doi.org/10.29057/aactm.v2i2.9712
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Articles
