Formación de películas delgadas base TiN sobre un acero AISI M2 mediante la técnica de PVD

O.A.  Gómez-Vargas; J.  Oseguera-Peña; M.  Ortiz-Domínguez; J.A.  García-Macedo; J.  Solís-Romero; V.A.  Castellanos-Escamilla; U.  Figueroa-López; A.  Arenas-Flores; F.R.  Barrientos-Hernández; E.  Cardoso-Legorreta

doi:10.29057/aactm.v2i2.9712

Authors

O.A. Gómez-Vargas Instituto Tecnológico y de Estudios Superiores de Monterrey https://orcid.org/0000-0003-3310-6605
J. Oseguera-Peña Instituto Tecnológico y de Estudios Superiores de Monterrey https://orcid.org/0000-0002-7061-7781
M. Ortiz-Domínguez Universidad Autónoma del Estado de Hidalgo https://orcid.org/0000-0003-4475-9804
J.A. García-Macedo Instituto Tecnológico y de Estudios Superiores de Monterrey https://orcid.org/0000-0003-0768-4823
J. Solís-Romero Instituto Tecnológico de Tlalnepantla https://orcid.org/0000-0002-2483-083X
V.A. Castellanos-Escamilla Instituto Tecnológico de Tlalnepantla https://orcid.org/0000-0001-8511-4477
U. Figueroa-López Instituto Tecnológico y de Estudios Superiores de Monterrey https://orcid.org/0000-0001-7297-702X
A. Arenas-Flores Universidad Autónoma del Estado de Hidalgo https://orcid.org/0000-0002-2997-4234
F.R. Barrientos-Hernández Universidad Autónoma del Estado de Hidalgo https://orcid.org/0000-0001-5459-7162
E. Cardoso-Legorreta Universidad Autónoma del Estado de Hidalgo https://orcid.org/0000-0003-2893-2064

DOI:

https://doi.org/10.29057/aactm.v2i2.9712

Keywords:

Cathodic pulverization, Thin layers, Attrition

Abstract

The deposition of TiN thin films with a few nanometers thickness was carried out through reactive sputtering of a Ti target in an Ar+N atmosphere using a DC power supply. The deposited films were made on AISI M2 steel specimens cut from a 1 to 1.5” diameter bar with a maximum thickness of 8 mm. Finally, the TiN layers were characterized using various techniques including: Optical Microscopy (OM), Scanning Electron Microscopy (SEM) linked with Energy Dispersive Spectroscopy (EDS), Pin on disc and Scratch.

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Publisher: Universidad Autónoma del Estado de Hidalgo

References

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