Efecto de la temperatura de recocido en la morfología de estructuras hibridas de ZnO/silicio cristalino y poroso

Lizeth Martínez Ayala; Angélica Guadalupe Hernández Zanabria; Sion Federico Olive Méndez; Vivechana Agarwal; J.  Campos-Alvarez

doi:10.29057/icbi.v7i14.4481

Lizeth Martínez Ayala Universidad Autónoma del Estado de Hidalgo https://orcid.org/0000-0001-8231-3163
Angélica Guadalupe Hernández Zanabria Universidad Autónoma del Estado de Hidalgo https://orcid.org/0000-0002-3750-5083
Sion Federico Olive Méndez Centro de Investigación en Materiales Avanzados https://orcid.org/0000-0002-1541-0331
Vivechana Agarwal Centro de Investigación en Ingeniería y Ciencias Aplicadas https://orcid.org/0000-0003-2168-853X
J. Campos-Alvarez Instituto de Energías Renovables

DOI: https://doi.org/10.29057/icbi.v7i14.4481

Keywords: zinc oxide, porous silicon, gas sensor

Abstract

In present work zinc oxide (ZnO) was deposited over porous silicon (Si-P) substrates at 400°C and 600°C using magnetron sputtering technique. Scanning electron microscopy (SEM) results indicated the formation the interconnected holes patterns of porous silicon. The change in morphology of ZnO over porous silicon at different temperature was examined with atomic force microscopic (AFM). AFM results revealed that, ZnO deposition at 400°C possess relatively lower roughness. The increase in temperature deposition resulted in the height increase of ZnO grains. The results presented could give us the possibility to fabricate substrates capable for gas sensing with improved sensitivity due to porous substrates and deposited temperature.

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Author Biographies

Lizeth Martínez Ayala, Universidad Autónoma del Estado de Hidalgo

Escuela Superior Tepeji del Rio, Universidad Autónoma del Estado de Hidalgo, Ingeniería Industrial, Av. del maestro no. 41, col. Noxtongo 2da. Sección, Tepeji del Rio 42855, Hidalgo, México.

Angélica Guadalupe Hernández Zanabria, Universidad Autónoma del Estado de Hidalgo

Escuela Superior Tepeji del Rio, Universidad Autónoma del Estado de Hidalgo, Ingeniería Industrial, Av. del maestro no. 41, col. Noxtongo 2da. Sección, Tepeji del Rio 42855, Hidalgo, México.

Sion Federico Olive Méndez, Centro de Investigación en Materiales Avanzados

Centro de Investigación en Materiales Avanzados, Av. Miguel Cervantes 120, Complejo Industrial Chihuahua, 31136, Chihuahua, México.

Vivechana Agarwal, Centro de Investigación en Ingeniería y Ciencias Aplicadas

Centro de Investigación en Ingeniería y Ciencias Aplicadas, Universidad Autónoma del Estado de Morelos, Av. Universidad 1001, Col. Chamilpa, Cuernavaca, 62209, Morelos, México.

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