Design and fabrication of ultrasonic spray pyrolysis deposition technique
Abstract
Design, fabrication and installation of ultrasonic spray pyrolysis (USP) deposition technique was reported in this work. By utilizing homemade USP deposition system, the thickness of the films and the crystallinity of the material can be precisely controlled by varying deposition time and temperature respectively. A minimum of 15 s and 250 ℃ of deposition time and temperature were achieved by this system. Additionally, the frequency of the ultrasonic nebulizer and air flow rates can be varied depending on the precursor material in order to obtain best quality thin films. Homogenous thin films with thick ness varying from 50 to 500 nm can be obtained by this USP system. Films obtained by this system possess a wide range of applications such as for photoluminescent devices, waste water treatment and gas sensing applications.
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